Makasudin yana da ayyuka da yawa da aikace-aikace masu faɗi a fagage da yawa.Sabbin kayan aikin sputtering kusan suna amfani da magneto mai ƙarfi don karkatar da electrons don haɓaka ionization na argon a kusa da manufa, wanda ke ƙara yuwuwar karo tsakanin maƙasudi da ions argon,
Ƙara yawan sputtering.Gabaɗaya, ana amfani da sputtering DC don shafan ƙarfe, yayin da ake amfani da sputtering sadarwar RF don kayan maganadisu na yumbu mara ƙarfi.Babban ƙa'idar ita ce amfani da fitarwa mai haske don buga ions argon (AR) akan saman maƙasudin a cikin injin, kuma cations a cikin plasma za su hanzarta yin hanzari zuwa farfajiyar wutar lantarki mara kyau azaman abin da aka fantsama.Wannan tasirin zai sa kayan abin da aka yi niyya su tashi su tashi su ajiye a kan substrate don samar da fim.
Gabaɗaya, akwai fasali da yawa na murfin fim ta amfani da tsarin sputtering:
(1) Karfe, gami ko insulator na iya zama bayanan fim na bakin ciki.
(2) A ƙarƙashin yanayin saitin da ya dace, fim ɗin tare da abun da ke ciki ɗaya za a iya yin shi daga maƙasudai masu yawa da rikice-rikice.
(3) Ana iya yin cakuda ko fili na kayan da ake niyya da ƙwayoyin iskar gas ta hanyar ƙara iskar oxygen ko wasu iskar gas mai aiki a cikin yanayin fitarwa.
(4) Maƙasudin shigarwa na halin yanzu da lokacin sputtering ana iya sarrafawa, kuma yana da sauƙi don samun kauri mai ma'ana mai mahimmanci.
(5) Yana da fa'ida wajen shirya wasu fina-finai.
(6) The sputtered barbashi da wuya ya shafi nauyi, kuma manufa da substrate za a iya shirya da yardar kaina.
Lokacin aikawa: Mayu-24-2022