1.Sputtering shiri
Yana da matukar muhimmanci a kiyaye ɗakin ɗakin, musamman ma tsarin sputtering mai tsabta.Duk wani ragowar da aka samu ta hanyar lubricating mai, ƙura da rufin da ya gabata zai tattara tururin ruwa da sauran gurɓataccen gurɓataccen ruwa, wanda zai yi tasiri kai tsaye akan digiri na vacuum kuma yana ƙara yiwuwar gazawar fim.Gajeren kewayawa ko harbin da aka yi niyya, yanayin fim mai ƙazanta da ƙazantar ƙazantar sinadarai galibi ana haifar da su ta ƙazantar ƙazantar ƙazanta, bindiga da hari.Don yin la'akari da halaye na abun da ke ciki na sutura, wajibi ne don tsaftacewa da bushe iskar gas (argon ko oxygen).Bayan an shigar da substrate a cikin ɗakin sputtering, ana buƙatar fitar da iska don isa wurin da ake buƙata ta hanyar.Rufin garkuwar da ke cikin wuri mai duhu, bangon rami da saman da ke kusa kuma yana buƙatar kiyaye tsabta.Lokacin tsaftace ɗakin ɗakin, muna ba da shawarar yin amfani da gilashin ƙwallon ƙwallon ƙwallon ƙafa don kula da sassa masu ƙura, tare da matsewar iska don cire ragowar sputtering na farko a kusa da ɗakin, sa'an nan kuma a hankali a goge saman waje tare da takarda mai yashi alumina.Bayan goge takarda gauze, ana tsabtace shi da barasa, acetone da ruwa mai narkewa.Tare, yana ba da shawarar yin amfani da injin tsabtace masana'antu don tsaftacewa.Makasudin da ƙarfe na Gaozhan ya samar an cika su a cikin buhunan filastik da aka rufe,
Gina cikin wakili mai tabbatar da danshi.Lokacin amfani da maƙasudin, don Allah kar a taɓa maƙasudin kai tsaye da hannunka.Lura: lokacin amfani da maƙasudin, da fatan za a sa safofin hannu masu tsabta da maras kyau.Kada ku taɓa maƙasudin kai tsaye da hannuwanku
2. Tsabtace manufa
Manufar tsaftacewa shine don cire ƙura ko datti wanda zai iya kasancewa a saman abin da ake nufi.
Ana iya tsaftace maƙasudin ƙarfe a matakai huɗu,
Mataki na farko shine tsaftacewa tare da lint mai laushi mai laushi wanda aka jiƙa a cikin acetone;
Mataki na biyu yana kama da mataki na farko, tsaftacewa tare da barasa;
Mataki na 3: Tsaftace da ruwa mai tsafta.Bayan an wanke da ruwa mai narkewa, sanya manufa a cikin tanda kuma a bushe a 100 ℃ na minti 30.
Tsaftace maƙasudin oxide da yumbu za a yi su tare da “tufafi kyauta”.
Mataki na hudu shine a wanke makasudin tare da argon tare da matsa lamba mai yawa da ƙananan iskar gas bayan cire wuri mai ƙura, ta yadda za a cire duk wani nau'i na ƙazanta wanda zai iya haifar da arc a cikin tsarin sputtering.
3. Na'urar Target
A cikin aiwatar da shigarwa na manufa, Z mahimmancin kariya shine tabbatar da kyakkyawar haɗin wutar lantarki tsakanin manufa da bangon sanyaya na bindigar sputtering.Idan filin yaƙar sandar sanyaya ya yi tsanani ko kuma yaƙe-yaƙe na farantin baya ya yi tsanani, na'urar da aka yi niyya za ta tsage ko lanƙwasa, kuma zafin wutar lantarki daga maƙasudin baya zuwa abin da ake nufi zai yi tasiri sosai, wanda zai haifar da gazawar watsawar zafi. a cikin tsarin sputtering, kuma manufa za ta fashe ko rasa
Don tabbatar da haɓakar zafin jiki, ana iya ɗaukar takarda na graphite takarda tsakanin bangon sanyaya na cathode da manufa.Da fatan za a kula don bincika a hankali kuma ku bayyana lebur na bangon sanyaya na bindigar sputtering da ake amfani da shi don tabbatar da cewa zoben O-ring koyaushe yana wurin.
Tun da tsabtar ruwan sanyi da aka yi amfani da shi da ƙurar da za ta iya faruwa a lokacin aikin kayan aiki za a ajiye su a cikin tanki mai sanyaya ruwa na cathode, wajibi ne a duba da kuma tsaftace ruwan sanyi na cathode lokacin shigar da manufa don tabbatar da santsi. zagayawar ruwan sanyaya da cewa ba za a toshe mashigar da mashigar ba.
An shirya wasu cathodes don samun ƙaramin sarari tare da anode, don haka lokacin shigar da manufa, ana buƙatar tabbatar da cewa babu taɓawa ko jagora tsakanin cathode da anode, in ba haka ba za a sami ɗan gajeren kewayawa.
Koma zuwa littafin afaretan kayan aiki don bayani kan yadda ake aiki da manufa daidai.Idan babu irin wannan bayanin a cikin littafin mai amfani, da fatan za a gwada shigar da na'urar bisa ga shawarwarin da suka dace da Gaozhan karfe ya bayar.Lokacin daɗa abin da aka yi niyya, da farko a ɗaure ƙugiya ɗaya da hannu, sa'an nan kuma ƙara wani kullin a kan diagonal da hannu.Maimaita wannan har sai an ɗaure dukkan ƙullun da ke kan na'urar, sa'an nan kuma ƙara da wani abu.
4. Short kewaye da tightness dubawa
Bayan kammala na'urar da aka yi niyya, ana buƙatar bincika gajeriyar kewayawa da ƙarfi na duka cathode.
An ba da shawara don ƙayyade ko akwai ɗan gajeren kewayawa a cikin cathode ta amfani da mitar juriya
Wariya ta layi.Bayan tabbatar da cewa babu gajeriyar kewayawa a cikin cathode, za a iya gano ɗigon ruwa, kuma za a iya shigar da ruwa a cikin cathode don tabbatar da ko akwai zubar ruwa.
5. Target pre sputtering
Manufa pre sputtering masu ba da shawarar tsantsar sputtering argon, wanda zai iya tsaftace saman abin da aka sa a gaba.Lokacin da aka riga aka tofa maƙasudin, ana ba da shawarar don haɓaka ƙarfin sputter a hankali, kuma ƙimar ƙarfin yumbura shine 1.5WH / cm2.Matsakaicin saurin sputtering karfe manufa na iya zama mafi girma fiye da na yumbu manufa toshe, kuma madaidaicin ƙimar ƙarfin ƙarfi shine 1.5WH / cm2.
A cikin aiwatar da pre sputtering, muna bukatar mu duba arcing na manufa.Tsawon lokacin zufa gabaɗaya kusan mintuna 10 ne.Idan babu al'amarin arcing, ci gaba da ƙara ƙarfin sputtering
Zuwa ikon saita.Dangane da gwaninta, babban ƙarfin zuƙowa na Z mai karɓuwa na maƙasudin ƙarfe shine
25watts / cm2, 10watts / cm2 don maƙasudin yumbu.Da fatan za a koma zuwa tushen saiti da kuma gogewar matsa lamba a cikin ɗaki yayin zuƙowa a cikin littafin tsarin aiki na mai amfani.Gabaɗaya, ya kamata a tabbatar da cewa zafin ruwa a madaidaicin ruwan sanyaya yakamata ya zama ƙasa da 35 ℃, amma Z yana da mahimmanci don tabbatar da cewa tsarin zagayawa na ruwan sanyaya zai iya aiki yadda ya kamata.
Saurin zagayawa na ruwa mai sanyi yana kawar da zafi, wanda shine muhimmin garanti don tabbatar da ci gaba da sputtering tare da babban iko.Don maƙasudin ƙarfe, gabaɗaya ana ba da shawarar cewa kwararar ruwan sanyi shine
20lpm ruwa matsa lamba ne game da 5gmp;Don maƙasudin yumbu, ana ba da shawarar gabaɗaya cewa kwararar ruwa shine 30lpm kuma matsa lamba na ruwa kusan 9gmp
6. Kulawa da manufa
Don hana gajeren kewaye da arcing lalacewa ta hanyar rashin tsabta a cikin tsarin sputtering, dole ne a cire sputter da aka tara a tsakiya da bangarorin biyu na waƙar sputtering a matakai.
Wannan kuma yana taimaka wa masu amfani don ci gaba da tofa albarkacin bakinsu a babban ƙarfin ƙarfin z
7. Ma'ajiyar manufa
Makasudin da karfen Gaozhan ya samar an tattara su a cikin jakunkuna na filastik filastik.Muna ba da shawarar cewa masu amfani su kiyaye abubuwan da ake hari, ko ƙarfe ko yumbu, cikin marufi.Musamman ma, abubuwan haɗin haɗin suna buƙatar adana su a ƙarƙashin yanayi mara kyau don hana iskar shaka na Layer bonding daga tasirin haɗin haɗin gwiwa.Game da marufi na maƙasudin ƙarfe, muna ba da shawarar cewa ya kamata a haɗa Z a cikin jakunkuna masu tsabta
Lokacin aikawa: Mayu-13-2022