Menene sputter manufa abu

Magnetron sputtering shafi ne wani sabon jiki tururi shafi hanya, idan aka kwatanta da a baya evaporation shafi hanya, da abũbuwan amfãni a da yawa fasali ne quite na ƙwarai.A matsayin babbar fasaha, an yi amfani da sputtering magnetron a fagage da yawa.

　　Ka'idar sputtering Magnetron:

Ana ƙara filin maganadisu na orthogonal da filin lantarki tsakanin sandar manufa ta sputtered (cathode) da anode, kuma iskar da ake buƙata ta inert (yawanci Ar gas) yana cika a cikin babban ɗaki.Wurin maganadisu na dindindin yana samar da filin maganadisu 250-350 a saman abin da aka yi niyya, kuma filin lantarki na orthogonal yana kunshe da babban filin lantarki.A karkashin tasirin wutar lantarki, Ar gas ionization cikin tabbatacce ions da electrons, manufa da kuma yana da wani mummunan matsa lamba, daga manufa daga iyakacin duniya ta sakamakon Magnetic filin da aiki gas ionization yiwuwa karuwa, samar da wani babban yawa plasma kusa da cathode, Ar ion a ƙarƙashin aikin lorentz ƙarfi, saurin tashi zuwa saman da ake niyya, bama-bamai da aka yi niyya a babban gudu, Atom ɗin da aka zube akan manufa suna bin ka'idar juzu'in juzu'i kuma suna tashi daga saman manufa tare da babban motsi. makamashi zuwa fim ɗin jigon substrate.

Gabaɗaya sputtering Magnetron ya kasu kashi biyu: sputtering DC da RF sputtering.Ka'idar kayan aikin sputter na DC abu ne mai sauƙi, kuma ƙimar yana da sauri lokacin zubar da ƙarfe.Amfani da RF sputtering ya fi yawa, ban da sputtering conductive kayan, amma kuma sputtering kayan da ba conductive, amma kuma amsa sputtering shirye-shirye na oxides, nitrides da carbides da sauran mahadi kayan.Idan mitar RF ya karu, ya zama mai zubar da jini na microwave.A halin yanzu, nau'in resonance na electron cyclotron (ECR) ana yawan amfani da sputtering plasma sputtering.

　　Magnetron sputtering shafi manufa abu:

Karfe sputtering manufa abu, shafi gami sputtering shafi abu, yumbu sputtering shafi abu, boride yumbu sputtering manufa kayan, carbide yumbu sputtering manufa abu, fluoride yumbu sputtering manufa abu, nitride yumbu sputtering manufa kayan, oxide yumbu manufa, selenide yumbu sputtering abu, silicide yumbu sputtering kayan niyya, sulfide yumbu sputtering manufa abu, Telluride yumbu sputtering manufa, sauran yumbu manufa, chromium-doped silicon oxide yumbu manufa (CR-SiO), indium phosphide manufa (InP), gubar arsenide manufa (PbAs), indium arsenide manufa (InAs).